Hydrophobic inorganic films were obtained by direct deposition of copper orsilicon onto natural lotus leaves by ion beam sputtering deposition technique.Scanning electron microscopy observations showed a lotus-leaf-like surfacestructure of the deposited inorganic films. Hydrophobic nature of the inorganicfilms on lotus leaves had been improved compared to the inorganic filmsdeposited on flat silicon substrates. Water contact angles measured on thelotus-leaf-like copper and silicon films were 136.3 \pm 8{\deg} and 117.8 \pm4.4{\deg}, respectively. The hydrophobic lotus-leaf-like inorganic films hadbeen repeated used as nanoimprint stamps. Negative structures oflotus-leaf-like inorganic films were obtained on the polystyrene resist layers.
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